采用直流磁控溅射方法，以K9玻璃为衬底制备掺铝氧化锌（ZnO：Al，AZO）薄膜。在300℃真空条件下对样品进行退火处理，研究不同退火时间对薄膜内部微观结构、表面形貌及光学特性的影响。结果表明，最佳退火时间为2 h，此条件下的AZO薄膜具有较强的（002）衍射峰，晶粒尺寸为17.2 nm，表面结构平整致密，紫外-可见波段的平均透射率为93.47%，光学带隙为3.41 eV。

Aluminum-doped Zinc Oxide (ZnO:Al, AZO) thin films are deposited on K9 glasses by the DC magnetron sputtering. The deposited samples are annealed under the condition of vacuum and 300℃. Effects of annealing time on the microstructure, surface topography and optical properties of AZO thin films are researched, respectively. Results show that the optimal annealing time is 2 h. AZO thin films deposited under this condition has a stronger (002) diffracting peak with the grain size of 17.2 nm, and the surface microstructure is smooth and compact. The average transmittance of the sample in the UV-Vis band is 93.47%, and the corresponding optical energy gap is 3.41 eV.