光学仪器, 2015, 37 (3): 278, 网络出版: 2015-08-25
Al、Sn掺杂对于ZnO薄膜微结构及光学特性的影响
The microstrcuture and optical properties of Al, Sn doped ZnO thin film
摘要
采用真空电子束蒸发金属薄膜及后续热氧化技术在石英衬底上分别制备出了ZnO、Al∶ZnO以及Sn∶ZnO薄膜。通过X射线衍射仪(XRD), 紫外可见分光光度计和原子力显微镜(AFM)等分析仪器对比研究了Al、Sn掺杂对ZnO薄膜结晶质量、光学性质及表面形貌的影响。测试结果表明, Al、Sn掺杂可以使薄膜结晶质量得到提高, 薄膜应力部分释放, 薄膜表面的粗糙度也相应增加, 掺杂对薄膜光学带隙的影响在一定程度取决于金属薄膜的氧化程度, 氧化充分可以使光学带隙变宽, 反之则变窄。
Abstract
ZnO, Al∶ZnO and Sn∶ZnO thin film were obtained by thermal oxidation metal or alloy films deposited by vacuum electron beam evaporation technology. The effects of different dopants on the microstructure and optical properties of ZnO thin films were investigated by X-ray diffraction(XRD), optical transmittance, absorption and atomic force microscopy (AFM) measurement. The characterization results indicate that the metal doping has the effect of improving the crystal quality, partially releasing the stress and increasing the surface roughness of the film. The effect of dopant on the optical band-gap of the film depends on the oxidation level of the metal film.
脱文刚, 洪瑞金, 张大伟, 陶春先. Al、Sn掺杂对于ZnO薄膜微结构及光学特性的影响[J]. 光学仪器, 2015, 37(3): 278. TUO Wengang, HONG Ruijin, ZHANG Dawei, TAO Chunxian. The microstrcuture and optical properties of Al, Sn doped ZnO thin film[J]. Optical Instruments, 2015, 37(3): 278.