结合有机聚合物材料和无机SiO2材料, 设计一种1×2多模干涉—马赫曾德尔干涉仪热光开关, 优化器件参数, 并对其性能进行模拟.利用化学气相沉积、光刻等工艺制备热光开关, 并对其波导形貌进行表征.为了测试器件性能, 采用ARM7处理器和InGaAs光电探测器, 设计并研制了一种光开关性能测试系统.该系统主要由低纹波线性供电电源、光电探测器、前置放大器、主放大器、信号调理器、模数转换器、主控制器、显示器等构成.采用商用光功率计对该测试系统进行标定, 其零点漂移小于0.5 dBm.在光开关电极上施加不同的直流驱动电压, 作为对比, 利用自主研制的光功率计和商用光功率计分别测试光开关某端口的输出光功率.实验结果表明, 两种情况下测得曲线的变化趋势一致, 均在驱动电压为10 V时, 输出光功率达到最小值.该测试系统具有良好的性能, 可满足实际测试需要.

A 1×2 multimode interference Mach-Zehnder interferometer thermo-optical switch was designed by combining the advantages of organic polymer and inorganic SiO2 materials. The structural parameters were optimized and the device performances were simulated. Fabrication techniques, such as chemical vapor deposition and lithography, were adopted to fabricate the switch, and the waveguide appearance were characterized. Furthermore, in order to measure the performance of the device, a kind of measurement system for optical switch was developed using ARM7 processor and InGaAs photoelectric detector. The system is mainly composed of low-ripple linear power, photoelectric detector, preamplifier, main amplifier, signal regulator, AD converter, main controller, display module, etc. The system was calibrated with the help of a commerical optical power meter, and its zero drift is found to be smaller than 0.5 dBm. Applying different driving voltages on the electrode, the output optical power from one port of the switch was both measured by the self-developed optical power meter and the commerical power meter. the experimental results show that, the obtained two curves have the same variation trend, and when the driving voltage is 10 V, the two measured output powers both become the smallest. This shows that the measurement system has good performance and can meet the needs of the actual measurement. The system provides a solution for the performance measurement of optical switch due to its small size and high performance-cost ratio.