为实现高效率、小型化、可调谐、室温下稳定运转的半导体太赫兹(THz)波源，提出了采用光子集成技术，将两个并联的分布反馈(DFB)激光器与无源多模干涉耦合器(MMI)集成，输出THz 拍频抽运光束的方案。两DFB 激光器的光栅布拉格波长设计偏调为4.8 nm(0.6 THz)，通过改变集成器件中DFB 激光器的注入电流进行波长调谐，每路DFB 能够达到3.9 nm 的波长偏调。将拍频光束通过单模光纤耦合到频域分辨光学门(FROG）中对THz 拍频光束空间拍频包络进行测量，在不同的DFB 区注入电流下，证实了集成芯片在0.184~1.02 THz 频率调谐范围内可室温连续输出用于产生THz 波的有效THz 拍频光束。

To approach a high-efficiency, chip-size and widely tunable room temperature semiconductor terahertz (THz) frequency beating optical pumping beam source, an optical-integrated design is adopted. Two multipled distribute feedback (DFB) semiconductor lasers and a multimode interference (MMI) coupler are monolithically integrated on InP based substrate for terahertz frequency beating optical pumping beam generation. The designed Bragg wavelength spacing of the two DFBs is 4.8 nm (0.6 THz). The Bragg wavelength of the two DFBs can be tuned by the injected current. Each of them can red-shift by 3.9 nm. The output THz beating optical beam of the opticalintegrated chip can be coupled into the frequency resolved optical gate (FROG) through single mode fiber. By changing the injected current of the DFBs, room temperature THz frequency beating optical pumping beam source with a tunable frequency range of 0.184~1.02 THz is demonstrated.