激光与光电子学进展, 2015, 52 (9): 091601, 网络出版: 2015-08-28
Ta2O5材料光学常数的拟合及其应用 
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Optical Constants Fitting and Application of Ta2O5
摘要
Ta2O5作为高折射率材料有着广泛的应用,由于具有不同的色散和吸收,以及不同的工艺条件,Ta2O5材料的光学常数会出现差异.介绍了一种采用电子枪蒸发并加以离子束辅助技术制备Ta2O5薄膜的方法,实验基于柯西模型(CauchyModel)对Ta2O5薄膜在近紫外到近红外的光学常数进行了拟合,并说明了Ta2O5材料在短波通滤光片中的应用.
Abstract
Ta2O5 is widely used as a kind of high refractive index film material.The optical constant is vary because of dispersion and absorption as well as different technological conditions.A kind of using electron gun of fabrication of thin film evaporation and ion beam assisted method is introduced.The test based on the Cauchy model of the films in the near ultraviolet to near infrared optical constants are fitted,and illustrates the application of the material in short wavelength pass filter.
庄秋慧, 刘国军, 付秀华. Ta2O5材料光学常数的拟合及其应用[J]. 激光与光电子学进展, 2015, 52(9): 091601. Zhuang Qiuhui, Liu Guojun, Fu Xiuhua. Optical Constants Fitting and Application of Ta2O5[J]. Laser & Optoelectronics Progress, 2015, 52(9): 091601.
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