采用有限积分法分析了可见光入射薄膜太阳能电池时，电池中金属纳米栅与半导体界面的场分布与能流密度分布，并结合实际太阳光谱分布，提出一种分析太阳能电池陷光能力的计算方法。利用该方法对金、银、铜、铝金属纳米栅的形状与几何参数变化条件下所激发的表面等离激元产生的陷光效果进行了系统研究。结果表明太阳能电池中采用金属纳米栅结构电极可以提高太阳光的有效吸收率；对金属立方栅、锯齿栅(三棱柱)以及圆柱栅结构分析结果表明，采用立方栅结构时陷光效果最好，而且利用铜材料立方栅格结构的陷光效果最佳。当立方栅格高度为30 nm时，总陷光比最高；而立方体栅格的栅格周期决定陷光比峰值位置，栅格长度决定陷光比峰值宽度。所得结果对后续基于表面等离激元的薄膜太阳能电池的设计具有一定的指导意义。

The grating structure on metal contact electrode is designed to couple incident light into surface plasmon ploaritons, and a calculated approach is presented to quantitatively evaluate light trapping properties. It can be found that cube grating made by copper material can obtain the largest efficiency of thin film solar cell. The effect of the structure parameters of solar cell on the light trapping is discussed. An increasement in light trapping will be maximum with 30 nm height grating. The length of grating determines the width of peak in the light trapping spectra, and the period of grating determines the location of peak in the light trapping spectra. The results obtained have significance in further design to get more efficiency thin-film solar cells.