半导体光电, 2015, 36 (4): 657, 网络出版: 2015-09-08
扑翼微飞行器紫外激光加工技术
UV Laser Processing Technology of Flapping-wing Microair Vehicles
紫外激光 非硅微加工 碳纤维加工 扑翼微飞行器 UV laser non-silicon micromachining technology carbon fiber processing flapping-wing micro air vehicle
摘要
为了实现微米尺度扑翼微飞行器的加工, 运用了加工材料范围广的紫外激光切割技术, 以及碳纤维预浸料的真空袋高温高压固化工艺, 通过合理安排工艺流程, 实现了一种适于微米尺度复杂机械结构、可采用材料广泛且可以小批量快速加工的加工技术。并将其应用于扑翼微飞行器的加工, 得到了一个翼展3cm, 最小尺寸为80μm的飞行器样机。
Abstract
In this paper, in order to achieve the processing of micron scale flapping wing MAV(micro air vehicle), used is the UV laser processing method which can cut a wide range of materials, and vacuum bag for carbon fiber prepreg curing under high pressure and temperature. By reasonablly arranging the processing sequence, a suitable processing technology for the micron scale complex mechanical structure was realized, which can process a variety of materials rapidly and suit for small-lot production. Applying the technology for flapping wing MAV, an aircraft prototype with wingspan of 3cm and the minimum size of 80μm is obtained.
张伟, 张卫平, 柯希俊, 邹阳, 柴双双, 叶以楠. 扑翼微飞行器紫外激光加工技术[J]. 半导体光电, 2015, 36(4): 657. ZHANG Wei, ZHANG Weiping, KE Xijun, ZOU Yang, CHAI Shuangshuang, YE Yinan. UV Laser Processing Technology of Flapping-wing Microair Vehicles[J]. Semiconductor Optoelectronics, 2015, 36(4): 657.