光电子技术, 2015, 35 (2): 140, 网络出版: 2015-09-08
像增强管制作过程中的气密性研究
Investigation On the Air-tightness of Image Intensifier Fabrication Process
摘要
作为真空光电器件, 像增强管的气密性封装直接决定了整管的性能和可靠性。一般而言, 像增强管制作过程中涉及的封接工艺有热铟封、钎焊、低熔点玻璃粉熔封和金属熔融焊。本文从生产实际出发, 探讨了低熔点玻璃粉熔封和金属熔融焊对像增强管气密性的影响, 并提出了工艺改进措施, 结果表明, 像增强管的可靠性和成品率均有明显的提升。
Abstract
As a vacuum electronics component, the air-tightness of packaging plays an important role on the reliability of image intensifier. Generally, the packaging consists of indium seal, tube braze, screen seal and welding, during the fabrication of image intensifier. According to the practical production, the effects of screen seal and welding on the leakage rate are discussed in this paper. The measures of the technology improvement are also presented. The results show that the reliability and yield of image intensifier are greatly enhanced.
王涛, 赵文锦, 唐家业, 袁志耀. 像增强管制作过程中的气密性研究[J]. 光电子技术, 2015, 35(2): 140. WANG Tao, ZHAO Wenjin, TANG Jiaye, YUAN Zhiyao. Investigation On the Air-tightness of Image Intensifier Fabrication Process[J]. Optoelectronic Technology, 2015, 35(2): 140.