为了加工形貌稳定且尺寸尽可能小的纳结构,建立了一套连续激光复合微纳探针的加工系统,并研究了光纤探针导光的连续激光辐照微纳探针的近场增强效应以及该系统的加工性能.首先,根据表面等离子体激元理论仿真分析了激光辐照原子力显微镜(AFM)探针的近场增强因子,并研究了微纳探针的针尖温度场和针尖热膨胀.接着,搭建了基于光纤探针导光的连续激光复合微纳探针的纳结构加工系统.最后,对聚乙烯片状材料样品进行了纳结构加工.结果显示:加工得到的纳米点尺度为200 nm左右;纳米线的尺度为30~40 nm.结果表明:光纤探针导光连续激光复合微纳探针系统避免了复杂的空间光路结构,是一种成本低廉,结构简单的系统,能够实现纳结构的加工.

To obtain the nanostructure with stable morphology and a smallest possible size,a nanostructure machining system is established by an Atomic Force Microscopic(AFM)probe combined with a continuous laser.With this method,the study focuses on the near-field enhancement theoretical analysis and simulation when the continuous laser irradiates the AFM probe and the machining performance of this system.Firstly,based on the mechanism of surface plasmon(SP), the Factor of Enhancement Field(FEF),temperature field and the thermal expansion on the probe tip are researched.A nanostructure machining system is set up based on the optical fiber probe to guide the laser to irradiate on the AFM probe.At last,the polyethylene(PE)is chosen as a sample to do the experiment.Experimental results indicate that the size of the processed nanodot is about 200 nm and that of the nanowire is about 30-40 nm.This method shows the proposed probe has simple-structure and inexpensive-cost and could achieve nanostructure machining.