光学与光电技术, 2015, 13 (4): 83, 网络出版: 2015-09-08  

组合结构的中波红外带通滤光片研制

Design and Preparation of Medium-Wavelength Infrared Band Pass Combined Filter
作者单位
华中光电技术研究所—武汉光电国家实验室, 湖北 武汉 430223
摘要
采用长短波通膜系组合结构,对膜系光学性能进行了优化设计以及仿真分析。采用电子束蒸发,离子束辅助沉积工艺在Si基底两面分别沉积长短通膜。样品的透过率采用红外光谱仪测试,在3.7~4.2 μm波段范围内平均透过率在80%以上,在3~3.6 μm和4.3~5 μm波段范围内截止,并将理论设计与实验结果进行了对比分析。样品通过了GJB2485-95规定的环境适应性测试。产品满足设计要求,具有工程化应用价值。
Abstract
In this paper, the combination structure of long-pass film stacks and short-pass film stacks are adopted, and the optical performance of film system is optimized, simulated and analyzed. Long-pass and short-pass films are deposited respectively on both sides of Si substrate by using electron beam evaporation and ion assisted deposition. The sample is investigated by FTIR spectrometer, which shows an average transmittance ratio is more than 80% at wavelength region 3.7~4.2 μm, and rejected at region 3 μm~3.6 μm and 4.3 μm~5 μm. The designed and experimented results are contrasted and analyzed. The sample passes the environment test according to GJB2485-95, which meets the requirement for the design and has application value for engineering.

王航, 熊长新, 何光宗. 组合结构的中波红外带通滤光片研制[J]. 光学与光电技术, 2015, 13(4): 83. WANG Hang, XIONG Chang-xin, HE Guang-zong. Design and Preparation of Medium-Wavelength Infrared Band Pass Combined Filter[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2015, 13(4): 83.

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!