针对脆性石英玻璃的微加工, 利用自主研发的金刚石砂轮微尖端修整工艺, 研发了光纤阵列石英玻璃微V槽磨削技术。分析了60°的微V槽形状偏差对光纤耦合损耗的影响, 然后, 研究了砂轮微尖端的误差补偿修整工艺。最后, 实验分析了微V槽的磨削精度。理论分析显示: 微V槽角度、间距和宽度的偏差分别控制在±0.42°、±1.04 μm和±1.2 μm以内时, 耦合损耗小于0.5 dB。实验结果表明: 开发的数控磨削工艺可加工高精度的60°微V槽阵列; 采用数控轨迹和角度补偿修整后, 砂轮微尖端半径可平均达到10.46 μm, 角度精度为(60±0.22)°; 对石英玻璃进行微磨削后, 微V槽的角度偏差达到0.4°, 尖端半径为10.5 μm, 宽度偏差为0.3 μm, 间距偏差为0.5 μm, 可保证光纤阵列的精密对接。

As quartz glass is hard to be micro-machined, a self-researched truing technique of diamond wheel micro-tip was utilized to develop the grinding technique of micro V-groove arrays on the quartz glass. The influences of profile errors of 60° micro V-grooves on the coupling losses of optical fibers were analyzed. Then, the error compensation truing for grinding wheel micro-tip was researched. Finally, the grinding accuracy for micro V-grooves on quartz glass was experimentally investigated. The theoretical analysis indicates that when the angle, interval and the width of micro V-groove range ±0.42°, ±1.04 μm and ±1.2 μm, respectively, the coupling loss is less than 0.5 dB. The experimental results show that the Numerical Control( NC) precise grinding technique proposed can machine higher precise arrays, and the the V-tip angle and the radius of trued diamond wheel may reach 10.46 μm and (60±0.22)° by NC path and angle compensation truing, respectively. After micro-grinding of quartz glass, the micro V-groove shows an angle error of 0.4°, a tip radius of 10.5 μm, a width error of 0.3 μm and an interval error of 0.5 μm, which assures the precision connection of optical fiber arrays.