为了揭示高数值孔径光学系统在多重初级像差共同作用时受到的影响, 基于衍射理论, 研究了多重初级像差, 特别是彗差、象散和球差对汇聚高斯光束的影响效果.通过数值模拟计算, 获得了在彗差、象散和球差共同作用下, 汇聚高斯光束在焦平面处光斑的光强分布, 发现多重像差对聚焦光斑的影响并非各单像差影响效果的简单叠加.通过对高数值孔径光学系统激光焦斑的实际测量, 发现其光强分布特点与数值模拟结果具有高度的一致性.研究结果对于评估与分析实际的光学系统具有一定的指导意义.

For purpose of revealing the negative impacts of multiple primary aberrations in high numerical aperture optical system, the combined influence of the primary aberrations, especially coma, astigmatism and spherical aberration, on focusing Gaussian beam in high numerical aperture system was carried out based on diffraction theory. The intensity distribution of the Gaussian beam focal spot suffering multiple influence of coma, astigmatism and spherical aberration were acquired by numerical simulation. The results show that the impact of multiple abrration was not only superimposed of single aberration. In addition, a high consistency was found between the simulation results and the laser spots captured on the focal plane of a self-made high numerical aperture system, which indicated the reliability and reasonableness of the numerical simulation. The results present the optical distribution properties of Gaussian beam receiving multiple primary aberration effects, which will be helpful for evaluating and analyzing the practical optical focusing system.