针对光学反射镜在精磨向初抛光过渡阶段时面形与理想面形存在较大偏差的问题, 采用轮廓仪和普通干涉仪检测无法满足加工检测需求的问题, 提出采用动态范围大且准确度高的条纹反射法来检测光学反射镜.研究分析了条纹反射检测系统的原理及系统误差, 运用光线追迹软件对条纹反射检测100 mm口径反射镜面形进行建模仿真, 并对已经加工完成的100 mm口径旋转对称球面反射镜进行了检测, 测量得到的面形误差峰谷值及均方根值分别为0.523 μm和0.086 μm, 满足该过渡阶段的检测需求.

Large shape errors can be found from the stage of fine grinding to the beginning of polish, it is proved that it can′t satisfy the measuring requirements to test the mirrors with profilers or ordinary interferometer in that stage. To obtain the optical mirrors′ shape error based on fringe reflection, the method of high precision and large dynamic is proposed. The principle and system errors of the testing system were analyzed. To verify the feasible of the testing system, the model of testing on a reflecting mirror (the aperture is 100 mm) was built and simulated by ray tracing. The preliminary testing data on rotational symmetry spherical mirror is: PV is 0.523 μm, RMS is 0.086 μm, The feasibility of the testing system based on fringe reflection used in this period is verified.