应用激光, 2015, 35 (4): 488, 网络出版: 2015-12-18
1.064 μm红外皮秒激光器远紫外石英玻璃精密划线工艺研究
Research of Far UV Quarts Glass Precise Scribing by 1.064 μm Picosecond Laser
摘要
对激光加工石英玻璃精密划线工艺进行了实验研究, 探讨了不同工艺参数对加工效果的影响。使用1.06 μm红外皮秒激光器作为光源, 对厚度为0.4 mm的JGS1-1远紫外石英光学玻璃薄片进行激光划线切割, 在加工速度700 mm/s时, 获得样品正面崩边11.08 μm, 背面崩边7.610 μm, 侧面粗糙度为4 μm 的加工效果。结合实际加工要求, 利用控制变量法分析了光源、占空比、点间距及聚焦光斑等工艺参数对加工效果的影响, 得到一组最佳工艺参数。
Abstract
The processing of laser precision cutting quarts glass has been researched, the processing effects influenced by different parameters have been discussed. Use a 1.064 μm picosecond laser as light source, scribe cutting the JGS1-1 quartz glass which thickness is 0.4mm. Under the striping speed 700 mm/s, We get sample which obverse side edge collapse 11.08 μm, back side edge collapse 7.610 μm and side roughness 4um. Combined with the actual machining requirements, the influence of the light source, duty cycle, the point pitch and the focusing spot have been analyzed by using the control variable method and the best parameters have been given.
李勇, 曾令慧. 1.064 μm红外皮秒激光器远紫外石英玻璃精密划线工艺研究[J]. 应用激光, 2015, 35(4): 488. Li Yong, Zeng Linghui. Research of Far UV Quarts Glass Precise Scribing by 1.064 μm Picosecond Laser[J]. APPLIED LASER, 2015, 35(4): 488.