应用激光, 2015, 35 (4): 493, 网络出版: 2015-12-18
基于532 nm波长纳秒激光器的玻璃切割工艺研究
Research on Glass Cutting Process base on 532 nm Wavelength Nanosecond Laser
纳秒激光器 532 nm波长 玻璃切割 工艺参数 切割效果 nanosecond lasers 532 nm wavelength glass cutting process parameters cutting effect
摘要
基于EdgeWave GmbH 532 nm波长的纳秒激光器, 通过改变激光加工参数进行玻璃切割工艺实验, 研究激光工艺参数对玻璃切割效果的影响。实验表明, 通过对电流大小、填充间隔、分层切割和切割速度等激光参数的优化, 能够加工出边缘光滑、无横向微裂、无碎屑的玻璃基片, 获得较好的良品率。
Abstract
In this paper, the effect of laser processing parameters on the cutting of glass is studied by changing the laser parameters of the Edge Wave GmbH 532 nm wavelength nanosecond laser. Experiments show that we could get smooth edges, no transverse micro-cracking and free debris of glass substrates with higher yields by optimizing the laser parameters like current values, filling gap sizes, cutting depths and cutting speeds.
沈佳骏, 骆公序, 潘涌, 刘中俊, 姜兆华. 基于532 nm波长纳秒激光器的玻璃切割工艺研究[J]. 应用激光, 2015, 35(4): 493. Shen Jiajun, Luo Gongxu, Pan Yong, Liu Zhongjun, Jiang Zhaohua. Research on Glass Cutting Process base on 532 nm Wavelength Nanosecond Laser[J]. APPLIED LASER, 2015, 35(4): 493.
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