本文研究开尔文探针力显微镜(KPFM)中多频率方法的实现。KPFM 中的多频率方法同时激发微悬臂探针的第一次和第二次的本征机械振动模式并分别用于样品形貌和表面电势成像。据此，本文设计了一种基于传统比例-积分控制器基本原理的模拟式反馈控制器，用以实现探针的调控。测试表明，该反馈控制器带宽可达约5 kHz，并利用该反馈控制器研制出了多频率KPFM，其电势测量灵敏度优于5 mV。利用该多频率KPFM，对注入电荷后的介电薄膜样品进行测试，一次成像即可得到样品的形貌图及局域电势的二维分布图。该多频率KPFM 技术可广泛应用于电子材料与器件的电特性表征。

A realization of the multi-frequency technique for Kelvin Probe Force Microscopy (KPFM) is studied. In the multi-frequency KPFM, the first eigenmode of the cantilever probe is used for topographic imaging, while the second one is resonantly excited for surface potential. Thus, an additional feedback is needed to adjust the probe automatically. An analog feedback controller with bandwidth of about 5 kHz is designed based on the principle of conventional Proportional-integral Controller (PIC). Employing the controller, a novel multi-frequency KPFM is developed, whose sensitivity for surface potential measurement is demonstrated to be better than 5 mV. Topography and surface potential distribution for a kind of dielectric film with the injection of charge are imaged with the multi-frequency KPFM, suggesting its application in the characterization of electrical material and devices.