强激光与粒子束, 2015, 27 (9): 091002, 网络出版: 2015-11-30
微透镜阵列误差对半导体激光匀化性能的影响
Effects of microlens array error on performance of diode laser
激光技术 微透镜阵列 位置误差 半导体激光 均匀光斑 Laser technique microlens array position error laser diode homogenized spot
摘要
为了减小微透镜阵列误差对匀化光斑的影响,深入研究微透镜阵列光束匀化系统中微透镜阵列相对位置误差对光束匀化性能的影响,设计了一种微透镜阵列光束匀化系统。依据相对位置误差类型的不同,将双列微透镜阵列间六个自由度变化导致的误差分为距离误差、偏移误差以及转动误差进行分析,并对每种误差对光束匀化性能的影响进行了研究。采用6板条半导体激光器堆栈对上述匀化系统进行实验验证,实现了均匀性为90.75%的光斑,并对系统影响光斑性能的原因进行了分析。beam homogenization
Abstract
In order to minimize the effect of microlens array position error on homogenized spot, the influence of microlens array relative position error on diode laser beam homogenized performance is deeply researched, and a laser diode beam homogenization system based on microlens array has been designed. The position errors owning to the variation of six degrees of freedom between two arrays are classified into distance error, offset error and roll error, and the effects of the three position errors on beam homogenized performance are researched. The homogenization system is examined by the use of a laser diode array consist of 6 Bars, a uniform pumped spot with 90.75% homogeneity is achieved, and the factor influencing the spot homogeneity is analyzed.
雷呈强, 汪岳峰, 殷智勇, 尹韶云, 孙秀辉, 杜春雷. 微透镜阵列误差对半导体激光匀化性能的影响[J]. 强激光与粒子束, 2015, 27(9): 091002. Lei Chengqiang, Wang Yuefeng, Yin Zhiyong, Yin Shaoyun, Sun Xiuhui, Du Chunlei. Effects of microlens array error on performance of diode laser[J]. High Power Laser and Particle Beams, 2015, 27(9): 091002.