针对等离子体特定领域的应用需求,研制了一种基于上位机监控且具有手动/自动控制功能的脉冲电源。详细介绍了脉冲电源主电路、检测电路、驱动电路、数字脉宽调制（DPWM）产生模块以及脉冲变压器的设计方法。该电源采用现场可编程门阵列（FPGA）作为主控芯片,产生DPWM信号及继电器控制信号,经驱动电路放大后驱动逆变全桥及继电器。设计了过温和短路保护电路,通过DS18B20温度传感器和QBC10PS5霍尔电流传感器对电源模块的工作温度和电流进行实时采样。实际应用测试表明,该电源满足设计指标要求。

To meet the application demand of the field of plasma, a pulse power supply with the functions of manual and automatic and PC controls is developed. The Field Programmable Gate Array (FPGA) is used as the main control chip to generate digital pulse width modulation (DPWM) and relay control signals which are amplified by drive circuit and then drive the full-bridge inverter circuit and the relay. On sampling the real-time temperature and electric current through the temperature sensor DS18B20 and the Hall sensor QBC10PS5, over temperature and short protection circuits are designed. The main circuit, detection circuit, drive circuit, DPWM generation module and the design of pulse transformer are introduced in detail in this paper. Finally, the results of the experiments verify that the pulse power supply meets the technical requirements.