强激光与粒子束, 2015, 27 (11): 111003, 网络出版: 2015-11-30
LD快轴准直柱透镜多参数加工公差分析理论
Multi-parameter processing tolerance theory of fast axis collimation cylindrical lens of LD
半导体激光器 准直柱透镜 几何光学 公差分析 极限偏差值 semiconductor laser collimation cylindrical lens geometrical optics tolerance analysis limit deviation
摘要
为了实现半导体激光器快轴准直柱透镜加工公差的快速、准确制定,在快轴光束准直理论分析的基础上,采用几何光学的方法建立了多参数加工公差理论模型。该模型以各个结构参数的极限偏差值作为公差初始值,以实际的加工精度作为边界条件,并根据具体的准直设计要求进行优化,实现各个参数公差的合理、快速分配。针对常见的TO-MOUNT型号中的一款快轴发散角为36°的半导体激光器设计了快轴准直柱透镜,利用该理论模型实现快轴准直柱透镜加工公差的快速制定,引入该公差后的ZEMAX仿真结果符合准直设计要求,且仿真的出射光束发散角与理论计算结果仅有1.1%的误差。
Abstract
To achieve the high efficiency and accuracy of multi-parameter processing tolerance of fast axis collimation cylindrical lens used by semiconductor laser, we have established the corresponding theoretical model for multi-parameter theoretical model processing tolerances by geometrical optics method based on the theory of collimating the fast axis beam. Using the limit deviation of all the structural parameters as the initial value of tolerance, processing precision as the boundary conditions and optimizing the tolerance according to the requirement of design, the tolerances of all the parameters are set quickly and logically. Having designed the fast axis collimation cylindrical lens for a semiconductor laser with 36°divergence in fast axis of TO-MOUNT model, we developed quickly the tolerance of the fast axis collimation cylindrical lens by the model in the paper. The simulation result in ZEMAX by importing the tolerance meets the design requirement.
罗超, 尹韶云, 夏良平, 张为国, 雷呈强, 孙秀辉, 杜春雷, 罗春华. LD快轴准直柱透镜多参数加工公差分析理论[J]. 强激光与粒子束, 2015, 27(11): 111003. Luo Chao, Yin Shaoyun, Xia Liangping, Zhang Weiguo, Lei Chengqiang, Sun Xiuhui, Du Chunlei, Luo Chunhua. Multi-parameter processing tolerance theory of fast axis collimation cylindrical lens of LD[J]. High Power Laser and Particle Beams, 2015, 27(11): 111003.