MEMS可调光衰减器的波长相关损耗优化
Optimization of the wavelength-dependent loss of MEMS torsion mirror-based variable optical attenuators
摘要
基于MEMS(微机电系统)扭镜的光束偏转技术是实现VOA(可调光衰减器)的主流技术方案之一, 但其存在WDL(波长相关损耗)较大的问题。通过分析WDL的成因, 提出了一种优化设计方案。实验测得在波长范围1.53~1.57 μm与衰减范围0~20 dB内, WDL最大为0.21 dB, 验证了理论分析的正确性。
Abstract
The bean deflection technology based on Micro-Electro-Mechanical System (MEMS) torsion mirror is one of the main technical schemes for Variable Optical Attenuators (VOA), which is liable to high Wavelength-Dependent Loss (WDL). This paper presents a design optimization scheme on the basis of analyzing the causes of the WDL. The experimental test results indicate that in the warelength range of 1.53~1.57 μm and the attenuation range of 0~20 dB, the measured maximum WDL is 0.21 dB, verifying the correctness of the theoretical analysis.
陈旭, 万助军, 米仁杰, 罗志祥. MEMS可调光衰减器的波长相关损耗优化[J]. 光通信研究, 2015, 41(6): 49. Chen Xu, Wan Zhujun, Mi Renjie, Luo Zhixiang. Optimization of the wavelength-dependent loss of MEMS torsion mirror-based variable optical attenuators[J]. Study On Optical Communications, 2015, 41(6): 49.
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