四波前横向剪切干涉仪的出现为精确、快速地测试激光波前信息提供了很好的研究方法。概述了四波前横向剪切干涉仪的测试原理,对532 nm半导体激光器和ZYGO-GPI干涉仪标准激光源的光束波前进行测试,得到平均椭偏率分别为0.977和0.900。通过对测量数据与激光器标称参数对比分析得出四波前横向剪切干涉仪能够精确地测量激光波前信息。

Quadri-wave lateral shearing interferometer provides a useful method for studying the laser wavefront testing in accurately and rapidly. The test principle of quadri-wave lateral shearing interferometer is given in this paper. Wavefront information of semiconductor laser at 532 nm and ZYGO-GPI interferometer laser are tested based on SID4 wavefront sensor. the ellipticity obtained is 0.977 and 0.900. As a result, quadri-wave lateral shearing interferometer can precisely test the wavefront through compared with the test results with the nominal value of laser.