采用化学气相沉积-氧化烧结法，在不同工作压强条件下，制备了惯性约束聚变靶用空心玻璃微球（HGM）。利用扫描电子显微镜、原子力显微镜、VMR显微镜系统和能谱仪对HGM的表面形貌、球形度、壁厚均匀性以及成分进行了表征。分析了工作压强对HGM表面形貌、球形度、壁厚均匀性和成分的影响以及相互关系。研究表明：HGM的表面形貌随工作压强的增大而变得平滑致密，表面均方根粗糙度逐渐减小。随工作压强增大，HGM的球形度没有发生明显变化，而壁厚均匀性得到不断提高，微球中C元素浓度逐渐降低，Si元素浓度不断升高，O元素浓度基本保持不变。

By using chemical vapor deposition-depolymerizable mandrel method, hollow glass microspheres for inertial confinement fusion targets were fabricated at different coating pressure. Surface roughness, sphericity, wall thickness uniformity and composition were measured by scanning electron microscope, atomic force microscope, VMR microscope and energy dispersive spectrometer, respectively. The results show that as the coating pressure increases, the surface roughness of the hollow glass microsphere and the carbon concentration decrease, while the wall thickness uniformity and the silicon concentration of the hollow glass microspheres increase.