将二维金属光栅结构引入到探测器结构中,以提高太赫兹(THz)量子阱光电探测器的探测率。采用三维时域有限差分算法, 建立了THz量子阱光电探测器的二维金属光栅仿真模型, 详细分析了二维金属光栅参数对太赫兹量子阱光电探测器的电场强度的影响。仿真分析结果表明: 当入射光频率为6.27 THz(相对应波长为47.847 μm)、光栅周期P=10.5 μm、占空比=0.55(金属块宽度w= 5.755 μm)、光栅层厚度h=0.4 μm时, 器件中的Z方向上的电场值最大, 光栅的耦合效率最高。

The two-dimensional(2D) metallic grating was introduced into the detector to improve the detection rate of Terahertz(THz) quantum well photodetector(QWP). The 2D metal grating simulation model of THz QWP was established by using the 3D finite-difference time-domain algorithm, the impact on the electric field strength of the 2D metal grating parameters of THz QWP was analyzed detailed. The results show that for the 6.27 THz (the corresponding wavelength is 47.847 μm)incident light,the light electric field along the Z direction reaches its maximum and the grating coupling efficiency reached highest, when the grating parameters are taken as grating period P=10.5 μm,dute cycle w= 5.755 μm and grating layer thickness h=0.4 μm