光学仪器, 2019, 41 (5): 85, 网络出版: 2020-05-19  

结合线结构光立体视觉和条纹反射法的三维轮廓检测系统

3D shape measurement system based on line structure light stereo vision and fringe reflection
作者单位
上海理工大学 光电信息与计算机工程学院,上海 200093
摘要
三维轮廓检测能力决定了光学自由曲面开发的进度和应用的范围。基于条纹反射法检测原理提出了一种结合线结构光立体视觉和条纹反射法的三维轮廓检测系统。该系统主要用于光学自由曲面轮廓的检测,以立体视觉测量得到的光学自由曲面轮廓数据作为初值,结合相位测量偏折法测量数据的迭代,得到精度更高的光学自由曲面轮廓测量结果。实验结果表明,该系统可测量直径为300 mm、倾斜角范围为± 20°的自由曲面光学元件,系统的复合测量能力强,光学自由曲面的测量不确定度小于± 1 μm。
Abstract
With the increasing commercial application of free-form surfaces, the profile measurement capability of related molds and optical components has become a key bottleneck in the development and application of free-form optics, and the demand for free-form optics inspection tools is also increasing. In this paper, we developed an integrated free-form optics profile measurement system based on the fringe reflection principle, and the system is also combined with a laser stripe stereo vision measurement capability. The developed system is capable of measuring both rough surfaces and smooth optical surfaces. The measurement experiments prove that the current developed system can measure free-form optics with a diagonal size of approximately 300 mm, and the measurement uncertainty within ±1 μm.

宾博逸, 万新军, 解树平, 吕宋, 宋可. 结合线结构光立体视觉和条纹反射法的三维轮廓检测系统[J]. 光学仪器, 2019, 41(5): 85. Boyi BIN, Xinjun WAN, Shuping XIE, Song Lü, Ke SONG. 3D shape measurement system based on line structure light stereo vision and fringe reflection[J]. Optical Instruments, 2019, 41(5): 85.

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