Frontiers of Optoelectronics, 2015, 8 (3): 306, 网络出版: 2016-01-06
Profile and roughness of electrorheological finishing optical surfaces
Profile and roughness of electrorheological finishing optical surfaces
摘要
Abstract
This paper focuses on the process of electrorheological (ER) finishing optical surfaces. Experiments on K9 mirrors were conducted. In one experiment, the operating distance was varied over 0.5–0.8 mm with the voltage at 2000 V. The maximum peak-to-valley (PV) reduction was obtained at the distance of 0.5 mm, where the PV value was reduced from 58.71 to 25.03 nm. In another experiment, the voltage was varied over 1500– 3000 V with operating distance at 0.5 mm. The final surface roughness (Ra) achieved was as low as 2.5 nm. A higher voltage produced a higher relative reduction of the Ra. These experimental results validated the process.
Haobo CHENG, Jingshi SU, Yong CHEN, Hon-Yuen TAM. Profile and roughness of electrorheological finishing optical surfaces[J]. Frontiers of Optoelectronics, 2015, 8(3): 306. Haobo CHENG, Jingshi SU, Yong CHEN, Hon-Yuen TAM. Profile and roughness of electrorheological finishing optical surfaces[J]. Frontiers of Optoelectronics, 2015, 8(3): 306.