光电子技术, 2015, 35 (4): 217, 网络出版: 2016-01-19
透射式硅基液晶微显示器研制
Study of Design and Process for Transmissive LCoS Micro-display
微显示器 透射式硅基液晶 集成电路外延层剥离与转移 microdisplay transitive liquid crystal on silicon lift-off and transfer epitaxial layer of IC
摘要
设计并研制了一种单色透射式硅基液晶微显示器,详细论述了透射式硅基液晶微显示器的整个研制工艺流程。为实现透射式结构,驱动背板芯片采用SOI CMOS工艺设计并且流片; 使用两次键合的工艺完成了驱动背板芯片硅外延层的剥离和转移,掌握了实现透明背板的关键技术; 以此透明背板为驱动基板完成了SXGA单色透射式硅基液晶微显示器的研制。
Abstract
In this study a monochrome transmissive LCoS micro-display has been designed and fabricated. The entire process of fabrication has been discussed thoroughly. In order to realize transmissive structure, backplane with driver was designed and fabricated with SOI CMOS technology. Lifting-off and transferring epitaxial layer of driving IC has been achieved by two bonding steps. Based on these,, the SXGA monochrome transmissive LCoS micro-display was accomplished successfully.
杨洪宝, 李超, 刘凯丽, 陈仁军, 杨淼, 樊卫华, 王绪丰, 铁斌. 透射式硅基液晶微显示器研制[J]. 光电子技术, 2015, 35(4): 217. YANG Hongbao, LI Chao, LIU Kaili, CHEN Renjun, YANG Miao, FAN Weihua, WANG Xufeng, TIE Bin. Study of Design and Process for Transmissive LCoS Micro-display[J]. Optoelectronic Technology, 2015, 35(4): 217.
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