为研究多层膜反射镜的热稳定性,设计制备了工作在778 eV处的Co/Mo2C多层膜,研究了多层膜在退火实验中的热稳定性及界面结构的变化。通过X射线反射测试表征及拟合退火前后多层膜的结构信息,并用X射线衍射表征多层膜退火过程中膜层晶相结构的变化。结果表明,多层膜的界面质量较好,未退火样品处于无定形态。在退火过程中,周期厚度变化小,多层膜的热稳定性优异。随着退火温度的升高,在Mo2C-on-Co界面处,Co从Co-C混合区域中析出生成Co3Mo晶粒,界面扩散程度加大,从而Co-on-Mo2C界面的热稳定性要优于Mo2C-on-Co界面。

Thermal stability of the multilayer plays an important role in the applications. Co/Mo2C multilayer working at 778 eV was designed and fabricated by direct current magnetron sputtering, and the characterization was performed by using X-ray reflection and X-ray diffraction. The experimental results indicate great thermal stability with its period contraction. The as-deposited Co/Mo2C multilayer is in amorphous and has a good interface, while interfacial diffusion appears as the annealing temperature rising, and the Co-on-Mo2C interface is more stable than the Mo2C-on-Co interface due to Co3Mo crystalline alloy generated in Mo2C-on-Co interface.