构建满足凹面光栅使用条件的精确检测系统来检测凹面光栅的分辨率,根据系统的光源带宽、狭缝宽度和探测器像素尺寸的理论分析,结合凹面光栅的像差分析,给出一种凹面光栅分辨率检测系统的检测方法。系统按照JB/T 8239.2—95《衍射光栅技术条件》的标准方法,定量分析出上述三个因素的影响量,并提出了合理的计算方法,从而在检测系统的测量值中得到了凹面光栅实际的分辨率值。通过实验验证,实际检测结果与理论分析结果相差0.001 0~0.003 7 nm,是一种能够真实反映凹面光栅分辨率的光学检测方法。

In order to detect the resolution of the concave gratings, it needs to build a precise detection system. Based on the theoretical analysis of the system of the bandwidth of light source, the slit width and the pixel size of the detector, combining with the aberration analysis of concave gratings, a method for the resolution detection system is proposed. According to the standard method in JB/T 8239.2-95 which is named The technical conditions for diffraction grating, the system analyzes the above three factors quantitatively and puts forward a reasonable calculation method. Then it can obtain the practical value of concave grating resolution in the detection system. By experimental verification, the method can distinguish the difference between the test results and the theoretical analysis results from 0.001 0 nm to 0.003 7 nm.