首页 > 论文 > 激光与光电子学进展 > 53卷 > 2期(pp:21203--1)

一种光机系统结构稳定性评估方法

Stability Evaluation of Opto-Mechanical Systems

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

为了评估光机结构的长期稳定性,提出了一种偏移量解算的稳定性评估方案。首先进行数学建模,通过敏感矩阵建立了光机结构偏移量与系统波像差变化量的关系式,并给出了基于奇异值分解的偏移量求解方法。然后以微缩投影系统为研究对象,建立了敏感矩阵,在奇异值分解的基础上分析了像差奇异值向量与结构参数奇异值向量的对应关系。通过在实际搭建的微缩投影系统中人为引入偏移量,并与理论解算值进行对比,验证了方案的可行性。最后对系统长期稳定性进行了测试,为后续的结构优化提供了指导。

Abstract

In order to evaluate the long term stability of opto-mechanical systems, a novel method of long term instability evaluation based on the calculation of misalignment is presented. Firstly, a model has been built to find the relationship between the misalignment of the opto-mechanical systems and the wavefront error with the aid of sensitivity matrix, and a method for the misalignment calculation based on singular value decomposition (SVD) is given. Then, a reduced projection system is illustrated to analyze the relationship between the aberration singular vector and the configuration singular vector base on the SVD of constructed sensitivity matrix. Intended misalignments are added to the actual reduced projection system and the calculated result verifies the availability of the method. Finally, the long term stability is tested and it can orientate the opto-mechanic optimization.

Newport宣传-MKS新实验室计划
补充资料

中图分类号:O439

DOI:10.3788/lop53.021203

所属栏目:仪器,测量与计量

责任编辑:韩峰

基金项目:国家重大科技专项(2008ZX02501-008)

收稿日期:2015-07-01

修改稿日期:2015-07-15

网络出版日期:2016-01-08

作者单位    点击查看

郭本银:中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室, 吉林 长春 130033
谢耀:中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室, 吉林 长春 130033
于杰:中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室, 吉林 长春 130033
王丽萍:中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室, 吉林 长春 130033
苗亮:中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室, 吉林 长春 130033

联系人作者:郭本银(guobenyin2007@126.com)

备注:郭本银(1985—),男,硕士,研究实习员,主要从事光机结构设计方面的研究。

【1】L C Hale, R M Hudyma, J S Taylor, et al.. High-NA camera for an EUVL microstepper[C]. 15th Annual Americal Society for Precision Engineering, 2000, 521-524.

【2】R A Paquin. Dimensional stability: an overview[C]. SPIE, 1990, 1335: 2-19.

【3】D Malacara. Optical Shop Testing[M]. New York: A John Wiler & Sons Inc, 2007.

【4】Zhang Baodong, Qin Shiqiao, Wang Xingshu. Accurate and fast simulation of Kolmogorov phase screen by combining spectral method with Zernike polynomials menthod[J]. Chin Opt Lett, 2010, 8(10): 969-971.

【5】Lin Qiang, Jin Chunshui, Xiang Peng, et al.. Computer-aided alignment of Schwarzschild objective with off-axis illumination [J]. Optics and Precision Engineering, 2003, 11(2): 144-150.
林强, 金春水, 向鹏, 等. 离轴照明Schwarzschild 投影物镜的计算机辅助装调方法[J]. 光学精密工程, 2003, 11(2): 144-150.

【6】Henry N Chapman, Donald W Sweeney. A rigorous method for compensation selection and alignment of micro lithographic optical systems[C]. SPIE, 1998, 3331: 102-103.

【7】Brent J Bos, Joseph M Howard, Philip J Young, et al.. Global alignment optimization strategies, procedures, and tools for the James Webb space telescope (JWST) integrated science instrument module (ISIM)[C]. SPIE, 2012, 8442, 84423I.

【8】Zhao Yang, Gong Yan. Computer aided alignment of small scale projected objective[J]. Chinese Optics, 2012, 5(4): 394-400.
赵阳, 巩岩. 投影物镜小比率模型的计算机辅助装调[J]. 中国光学, 2012, 5(4): 394-400.

【9】Sun Jingwei, Chen Tao, Wang Jianli, et al.. Computer-aided alignment for primary and secondary mirrors Opt[J]. Optics and Precision Engineering, 2010, 18(10): 2156-2163.
孙敬伟, 陈涛, 王建立, 等. 主次镜系统的计算机辅助装调[J]. 光学精密工程, 2010, 18(10): 2156-2163.

【10】Ke Liu, Li Yanqiu, Liu Jingfeng, et al.. Computer aided alignment of a 20 X Schwarzschild projection optics[C]. SPIE, 2008, 7130: 713042.

【11】Jia Yong, Gao Yunguo, Shao Shuai. Opto-mechanical optimization for laser expander system under thermal loads[J]. Chinese J Lasers, 2014, 41(1): 0116003.
贾勇, 高云国, 邵帅. 热载荷下激光扩束系统的光机优化设计[J]. 中国激光, 2014, 41(1): 0116003

【12】Dou Zhenhai, Wang Yajing, Shen Jin, et al.. A hybrid non-negative inversion of dynamic light scattering based on truncated singular value decomposition[J]. Chinese J Lasers, 2013, 40(6): 269-274.
窦震海, 王雅静, 申晋, 等. 动态光散射混合非负截断奇异值反演[J]. 中国激光, 2013, 40(6): 269-274.

引用该论文

Guo Benyin,Xie Yao,Yu Jie,Wang Liping,Miao Liang. Stability Evaluation of Opto-Mechanical Systems[J]. Laser & Optoelectronics Progress, 2016, 53(2): 021203

郭本银,谢耀,于杰,王丽萍,苗亮. 一种光机系统结构稳定性评估方法[J]. 激光与光电子学进展, 2016, 53(2): 021203

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF