激光与光电子学进展, 2016, 53 (2): 021203, 网络出版: 2016-01-22  

一种光机系统结构稳定性评估方法 下载: 721次

Stability Evaluation of Opto-Mechanical Systems
作者单位
中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室, 吉林 长春 130033
摘要
为了评估光机结构的长期稳定性,提出了一种偏移量解算的稳定性评估方案。首先进行数学建模,通过敏感矩阵建立了光机结构偏移量与系统波像差变化量的关系式,并给出了基于奇异值分解的偏移量求解方法。然后以微缩投影系统为研究对象,建立了敏感矩阵,在奇异值分解的基础上分析了像差奇异值向量与结构参数奇异值向量的对应关系。通过在实际搭建的微缩投影系统中人为引入偏移量,并与理论解算值进行对比,验证了方案的可行性。最后对系统长期稳定性进行了测试,为后续的结构优化提供了指导。
Abstract
In order to evaluate the long term stability of opto-mechanical systems, a novel method of long term instability evaluation based on the calculation of misalignment is presented. Firstly, a model has been built to find the relationship between the misalignment of the opto-mechanical systems and the wavefront error with the aid of sensitivity matrix, and a method for the misalignment calculation based on singular value decomposition (SVD) is given. Then, a reduced projection system is illustrated to analyze the relationship between the aberration singular vector and the configuration singular vector base on the SVD of constructed sensitivity matrix. Intended misalignments are added to the actual reduced projection system and the calculated result verifies the availability of the method. Finally, the long term stability is tested and it can orientate the opto-mechanic optimization.

郭本银, 谢耀, 于杰, 王丽萍, 苗亮. 一种光机系统结构稳定性评估方法[J]. 激光与光电子学进展, 2016, 53(2): 021203. Guo Benyin, Xie Yao, Yu Jie, Wang Liping, Miao Liang. Stability Evaluation of Opto-Mechanical Systems[J]. Laser & Optoelectronics Progress, 2016, 53(2): 021203.

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