为了测量毫秒脉冲激光辐照非透明材料的在线应力及应力应变演化的过程，基于光学干涉理论，针对大功率固体激光器与材料的相互作用，采用马赫-曾德尔干涉的方法，得到了材料损伤的干涉条纹。通过对干涉条纹变化的分析与处理，可以得到材料在线应力及其演化过程。基于光学干涉理论，选择单晶硅作为实验材料，建立comsol仿真模型，并在理论及仿真的基础上开展实验。实验与仿真的r(x)方向误差在11.7%~33.91%之间，z(y，z)方向误差在20.25%~31.34%之间，说明用马赫-曾德尔干涉的方法测量非透明材料的应力具有可行性。实验研究为激光与非透明材料作用过程中在线应力损伤及演变过程研究提供了一个新的方法。

In order to measure the millisecond pulse laser irradiation of transparent material real-time stress and stress strain evolution process, in view of the high power solid laser interaction with materials, the method of Mach- Zehnder interference to get the interference fringes by the material damage is adopted. The on-line stress and the evolution of the material are obtained through the analysis and the processing of the change of the interference fringe. Single-crystal silicon is selected as experiment material and comsol simulation model is established based on the optical interference theory. Based on the theory and the simulation, the experiment is carried out. The error of experiment and simulation in r(x) direction is between 11.7% ~33.91%, and the error in z (y, z) direction is between 20.25% ~31.34% , which shows measuring the stress of the transparent material with Mach- Zehnder transient interference method is feasible. This provides a new method for the research of real-time stress damage and its evolution process of laser interaction with none-transparent materials.