研究了工作气体分压比、总气压、充电电压及输出镜反射率对激光单脉冲能量、脉冲宽度及峰值功率的影响。实验结果表明：对于输出能量，工作介质SF6和D2的分压比为10∶1及输出镜反射率为30%时最佳，正常辉光放电状态下提高充电电压有利于增加单脉冲能量，且对于每个电压存在使能量最大的最佳气压值。激光脉冲宽度随工作气体分压比及总气压的增大不断变窄，但随充电电压和输出镜反射率的升高不断变宽。综合考虑输出能量和激光脉宽，激光峰值功率的总体变化趋势与能量一致，但二者取得最大值所对应的气体参数及输出镜参数存在差别。

The effects of mixture gas ratio, gas pressure, charging voltage and output mirror reflectivity on laser pulse characteristics were studied. High energy was achieved when the ratio and output mirror reflectivity are 10∶1 and 30%, respectively. The energy can be increased by raising charging voltage under the normal glow discharge condition, and there exists an optimum gas pressure for each voltage to obtain the highest energy. As for laser pulse width, it can be shortened by increasing mixture ratio and total gas pressure, while stretched by increasing charging voltage and output mirror reflectivity. Taking both laser energy and pulse width, the variation trend of laser peak power is similar with the output energy on the whole, but the parameters of mixture gas and output mirror which make the energy or the peak power reaching maximum are different.