制冷型InSb红外焦平面探测器工作时需降温至低温(80 K)，器件在整个生命周期会经受从常温(300 K)到低温(80 K)的上千次高低温循环。针对该型探测器开展了高低温循环特性试验，测试和分析了上千次高低温循环过程中器件光电性能、杜瓦热负载和J-T制冷器特性的变化。试验结果表明，探测器可以经受至少2 000次高低温循环,并且探测率变化的幅度≤5.5%、响应率变化的幅度≤4.8%、盲元数未发生增加。研究结果为器件的工艺研发和改进提供了参考。

The cooled InSb infrared focal plane array(IRFPA) detectors should work in the temperature as low as 80 K. As a result, detectors are commonly subjected to thousands of thermal cycle from 80 K to room temperature(300 K) in the entire life cycle. Thermal cycle characteristic of the InSb IRFPA detector was studied. The FPA photoelectric parameter, Dewar heat load and J-T cooling characteristics were analyzed. The results indicated that the maximal fluctuation of the detectivity was 5.5%, the maximal fluctuation of the responsivity was 4.8%, and the number of dead pixels did not increase. The experimental results exhibited that the detectors could undergo at least 2 000 thermal cycles, which provides reference for the research and improvement of detector fabrication.