红外与毫米波学报, 2016, 35 (1): 42, 网络出版: 2016-03-22  

液相外延制备的InAs0.94Sb0.06薄膜的光学性质

Investigations on optical properties of LPE-grown InAs0.94Sb0.06 film
作者单位
中国科学院上海技术物理研究所,红外物理国家重点实验室,上海 200083
摘要
采用液相外延方法在InAs衬底上制备了InAs0.94Sb0.06外延薄膜.分别通过高分辨率X射线衍射谱和扫描电子显微镜测试对样品的结构特性和截面形貌进行表征分析,外延薄膜的晶体质量较好.利用样品在3 000~6 000 nm波段内的椭圆偏振光谱,结合介电函数模型,拟合得到了室温下InAs衬底和InAs0.94Sb0.06薄膜位于禁带位置附近的的折射率和消光系数光谱.由禁带位置附近的折射率能量增强效应确定InAs0.94Sb0.06薄膜的禁带宽度为0.308 eV.
Abstract
High quality InAs0.94Sb0.06 films were grown on InAs substrates by the liquid phase epitaxy technique. The structural characteristics and cross-section morphology of InAs0.94Sb0.06 samples were investigated by high-resolution x-ray diffraction measurements and scanning electronic microscopy measurements, respectively. The refractive index and extinction coefficient spectra of InAs0.94Sb0.06 film near the energy band gap were obtained by fitting room temperature infrared spectroscopic ellipsometry with the model of dielectric function in the range of 3 000 to 6 000 nm. The energy band gap of InAs0.94Sb0.06 was 0.308 eV, which was determined by refractive enhancement.

吕英飞, 周炜, 王洋, 俞国林, 胡淑红, 戴宁. 液相外延制备的InAs0.94Sb0.06薄膜的光学性质[J]. 红外与毫米波学报, 2016, 35(1): 42. LV Ying-Fei, ZHOU Wei, WANG Yang, YU Guo-Lin, HU Shu-Hong*, DAI Ning. Investigations on optical properties of LPE-grown InAs0.94Sb0.06 film[J]. Journal of Infrared and Millimeter Waves, 2016, 35(1): 42.

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