在空间环境中运行的激光系统必须遭受带电粒子的辐照，光学薄膜往往是激光系统中最薄弱的环节，其性能和稳定性易受带电粒子辐照的影响。我们采用离子束溅射法制备了1 064 nm 单波段双面增透膜样品，测得1 064nm 处透射率为99.964 5 %，吸收为50 ppm，用低能质子和电子(40 KeV)模拟空间带电粒子辐照样品，辐照通量为1.8×10¹³ 个/cm²，辐照引起样品1 064 nm 处透射率下降362 ppm，吸收增加5 ppm；退火处理后，样品的光学性能恢复。结合SRIM 程序模拟计算和分析，提出膜层内空位损伤是引起薄膜1 064 nm 处光学性能退化的原因。

Laser systems which operate in space environment must suffer irradiation of charging particles. Optical films are the weakest link in laser systems, and their performance and stability are easy to be affected by irradiation of charging particles. We prepared an anti-reflective film sample at 1 064 nm by Ion Beam Sputtering Deposition (IBSD), and the transmittance is 99.964 5% and the absorptance is 50 ppm at 1 064 nm. Then, used low energy protons and electrons (40 KeV) with fluencies of 1.8×10¹³ eV/cm² to irradiate the sample for space charging particles simulation. The irradiation caused a transmittance decrease of 362 ppm and an absorptance increase of 5 ppm at 1 064 nm. After thermal annealing, the optical performance of the sample was recovered. We used SRIM simulation results to analyze the experimental results, and concluded that the vacancy damage is the reason for the optical performance degradation of the film at 1 064 nm.