介绍了现有的微小光斑测量技术,针对纳米分辨率检测精度要求,对纳米分辨微小光斑光强分布检测技术进行深入研究,设计和构建了具有纳米分辨的微小光斑光强分布检测系统。利用该检测系统进行了低数值孔径弱聚焦下所形成的微光场光强分布检测实验,得到较好的光强分布图。实验结果表明,该检测系统具有可靠性高、稳定性好、便于操作等优点。

After introducing the existing measuring technique, the intensity distribution measuring technique of small light spot with nanometer resolution is investigate deeply based on requirements of nanometer resolution testing. Intensity distribution measuring system of small light spot was designed and constructed. By using intensity distribution measuring system which conducts light field intensity distribution detection experiment under low numerical aperture, a good surface of intensity distribution is obtained. The experimental results show that the intensity distribution measuring system has advantages of high reliability, good stability, and user-friendly interface.