采用基于半导体漂移扩散模型的数值模拟软件对高功率微波(HPM)作用下GGMOS型的静电放电(ESD)防护器件效应进行了数值模拟研究。对ESD器件在HPM作用下的响应特性及器件内部的物理图像进行了数值模拟。数值模拟的结果表明，外部注入HPM信号的幅值和频率是影响ESD器件的因素，在加载30 ns脉宽的HPM脉冲作用下，器件内部达到的最高温度与信号幅值成正指数关系。在给ESD注入相同幅值的HPM信号时，频率越大，器件达到失效温度所需要的时间越长。

The response of MOSFET to HPM is numerically studied by a simulator based on semiconductor drift-diffusion model. The response characteristics of ESD device under the action of HPM and the physical image of the device are simulated. The results of numerical simulation show that the amplitude and the frequency of the HPM signal are the factors that affect the ESD device, and the maximum temperature and the signal amplitude are positive exponential relationship with the HPM pulse width of the 30ns pulse. When the HPM signal is injected into the same amplitude ESD signal, the larger the frequency is, the longer the device can achieve the failure temperature. The results of this paper can provide a theoretical reference for the research of the damage mechanism of MOS device and the reinforcement design of the HPM device.