免标记、实时、高灵敏的生物检测是分析生物领域重要的技术。利用光波导模式理论构建生物传感器模型，设计了基于MEMS微镜的小型化生物传感检测系统，测试并分析了MEMS微镜的动态响应特性。通过计算仿真，得到了灵敏度与波导厚度和有效折射率之间的关系。以TE 模式和TM 模式进行葡萄糖溶液检测，实验结果表明，溶液浓度与入射角间呈现出良好的线性关系，灵敏度可达到5 ng/mL，相比传统的免疫学检测方法具有较高灵敏度。该方法由于检测系统体积小、结构简单、无标记，可实现原位检测，避免了对蛋白质活性的破坏，是一种具有较大潜力的蛋白质无标记光学检测方法。

The label- free, real- time and high sensitivity bio- detection serves as an important technology in analytical biology field. Biosensor model is constructed with optical waveguide mode theory, and a miniaturized biological sensing detection system is designed based on MEMS micro-mirror. Its dynamic response characteristic is tested and analyzed. By calculating and simulating, the relationship between sensitivity and thickness of waveguide and effective refractive index is obtained. Glucose solution is detected in TE mode and TM mode, experimental result shows that a well linear relationship between concentration of the glucose solution and incidence angle is presented, and the precision can reach 5 ng/mL. Compared with the traditional immunological detection methods, it has a relatively high sensitivity. Due to the small system and simple structure and label-free, it can realize the in-situ detection to avoid damaging the activity of protein, and it is a label-free optical detection method with great potential.