光学学报, 2016, 36 (5): 0522003, 网络出版: 2016-05-03
用于发散激光光束整形的自由曲面透镜设计 下载: 807次
Design of Freeform Surface Lens for Shaping Divergent Laser Beam
光学设计 激光光束整形 自由曲面 发散激光光束 逆向反馈优化 辐射照度均匀性 optical design laser beam shaping freeform surface divergent laser beam reverse feedback optimization irradiance uniformity
摘要
提出了一种激光光束整形自由曲面透镜的设计方法,这种方法可以对有一定发散角的激光光束进行整形。设计分为两个过程:1)设计初始结构,以准直激光光束作为输入光束,采用能量网格划分法,设计自由曲面整形透镜,将设计好的透镜作为下一步设计的初始结构;2)逆向反馈优化法,以带有一定发散角的光束作为输入光束,用上一步获得的透镜作为初始结构,采用逆向反馈优化的方法作进一步优化设计。应用这种方法,以束腰为10 mm,发散半角为2.5°的发散激光光束为例,将其整形为40 mm×40 mm的方形光束,辐射照度均匀度达到了90.4%。最后,对设计的透镜进行了加工误差分析和安装误差分析。分析结果表明:透镜表面面形误差在±5 μm范围内对目标平面辐射照度的均匀度几乎没有影响;透镜安装时,纵向位移误差dz对目标平面辐射照度的均匀度影响较小,横向误差dx、倾斜角误差dφ对辐射照度均匀度影响较大。
Abstract
A design method of laser beam shaping freeform surface lens is proposed, which can be applied to shape the diverging laser beam. Freeform surface lens design is a two-step process. Firstly, an initial lens layout is designed by establishing the input-output energy mapping relationship. Then, the reverse feedback optimization method is used to optimize the initial freeform lens when the divergent beam is applied. By this method, a freeform lens is designed for shaping a laser beam with beam waist of 10 mm and a half divergence angle of 2.5°. The simulation results show that the freeform lens can transform a Gaussian beam into a 40 mm×40 mm top-hat beam with an irradiance uniformity of 90.4%. Finally, the machining error analysis and the assembly tolerance analysis of the freeform lens are performed. It is shown that the uniformity is almost unchanged while the process error varies from -5 μm to 5 μm. And the longitudinal deviation error dz has little influence on the irradiance uniformity, but the lateral deviation error dx and slant angle error dφ have a significant influence on the irradiance uniformity.
彭亚蒙, 苏宙平. 用于发散激光光束整形的自由曲面透镜设计[J]. 光学学报, 2016, 36(5): 0522003. Peng Yameng, Su Zhouping. Design of Freeform Surface Lens for Shaping Divergent Laser Beam[J]. Acta Optica Sinica, 2016, 36(5): 0522003.