采用提拉法在ITO衬底上制备种子层,并使用电化学沉积制备高度取向的氧化锌纳米棒,研究了不同提拉次数下籽晶层厚度与电化学沉积电位对氧化锌纳米棒形貌的影响。在此基础上,制备了自驱动型紫外探测器并测试了其光响应谱。结果表明,该探测器可以对部分紫外波段(300~400 nm)有选择性地光响应,峰值响应度为0.012 A/W。

ZnO nanorods were fabricated by electrochemical deposition on ITO substrate with ZnO seed layer. The influences of the thickness of seed layer and the deposition potential on the morphology of ZnO nanorods were discussed. Furthermore, ZnO nanorods self-powered ultraviolet photodetector was fabricated. The spectral responsivity of this photodetector has a maximum value of 0.012 A/W from 300 to 400 nm.