基于体硅微加工技术，设计了一种闪耀角可调的微型可编程光栅，对该光栅进行优化设计，并理论计算不同闪耀角、入射角条件下相对光强分布，采用COMSOL有限元仿真软件模拟不同入射参量下远场相对光强分布.结果表明：设计的可编程光栅有效反射面积占光栅总面积的83.63%，比表面微加工技术设计的光栅提高8%以上，最大工作闪耀角为6.84°；当532 nm波长垂直入射时，0~10°闪耀角调制范围内最大衍射效率为96.67%.

Based on the silicon bulk micromachining process, a micro programmable grating with tunable blazed angle was designed and optimized. The relative light intensity in the cases of different blazed angle and incident angle was theoretically calculated. Also, the far-field relative light intensity with the changing incident parameters was surveyed by adopting the COMSOL, a finite element simulation tool. The results show that: compared with the surface-micromachined gratings designed in our previous research, the efficient reflecting area is increased by more than 8%, reaching to 83.63%. The realized maximum blazed angle of the designed grating is 6.84°, and the maxmium diffraction efficiency can be 96.67% under the condition of normal incidence with the wavelength of 532nm and the blazed angle with a tunable range of 0-10°.