光子学报, 2016, 45 (4): 0414004, 网络出版: 2016-05-11  

激光诱导击穿光谱在薄膜损伤分析中的应用

Application of Laser-induced Breakdown Spectroscopy to Analysis of Thin-film Damage
作者单位
1 南京理工大学 电子工程与光电技术学院, 南京 210094
2 西安工业大学 光电工程学院,西安 710021
摘要
提出了应用激光诱导击穿光谱技术对薄膜损伤特性进行表征的方法,研究了纳秒脉冲激光作用下薄膜损伤时的等离子体光谱特征,并应用该技术对薄膜的抗激光损伤特性进行了测量.实验测得,HfO2单层膜在78 mJ的激光能量的辐照下,薄膜损伤时的等离子体温度为2 807.4 K,且电子密度为7.4×1017cm-3.利用识别薄膜损伤时的等离子体光谱的特征,准确地判断了薄膜是否损伤,避免了薄膜损伤的误判现象.结果表明,激光诱导击穿光谱技术适用于薄膜的激光损伤测试中,并且是一种非常有效的测试分析方法.
Abstract
A method for characterization of thin-film damage by using laser-induced breakdown spectroscopywas propose. The innate infromation of plasma spectrum when film damaged under the nanosecond pulse laser irradiation was investigated. In experiment, the temperature and electronic density of plasma were seperately 2807.4K and7.4×1017cm-3when the HfO2 film was irradiated by 78mJ laser energy.And whether the film was damaged or not has been identified exactly through identifying the characteristics of the plasma spectrum, which avoid the phenomenon of misjudgement. The results shows that the application of laser-induced breakdown spectroscopy is fully applicable to the measurement of laser damage of the films, and is a highly effective method of test analysis on thin-film laser damage.

葛锦蔓, 苏俊宏, 徐均琪, 陈磊, 吕宁, 吴慎将. 激光诱导击穿光谱在薄膜损伤分析中的应用[J]. 光子学报, 2016, 45(4): 0414004. GE Jin-man, SU Jun-hong, XU Jun-qi, CHEN Lei, LV Ning, WU Shen-jiang. Application of Laser-induced Breakdown Spectroscopy to Analysis of Thin-film Damage[J]. ACTA PHOTONICA SINICA, 2016, 45(4): 0414004.

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