为了高精度测量被测物体表面3维轮廓，采用半导体激光器波数扫描干涉的方法，对激光波数扫描干涉进行了理论分析和实验验证。在迈克尔逊干涉系统的参考端引入一个光楔，通过2-D傅里叶变换提取光楔干涉图像的相位，在线检测激光器输出波数变化，最后对所有时间分辨干涉图像序列进行随机采样傅里叶变换，还原被测物体表面3维轮廓。结果表明，轮廓测量精度达到±6.7nm。该方法特别适合于机械零件的质量检验。

In order to measure 3-D profile of a sample with high accuracy, wavenumber-scanning interferometry was used. An optical wedge was used as reference terminal of a Michelson interferometer system. The phases of wedge interference image were extracted by 2-D Fourier transform. The changes of output wavenumber were detected on line. Finally, all the time-resolved interferometry image sequences were sampled by Fourier transform random. The 3-D contour of object surface was restored with high precision. The profile of a sample object was constructed with the resolution of ±6.7nm. The proposed method is particularly suitable for quality inspection of mechanical parts.