设计了一种基于双级复合平行板簧结构的大行程二维并联微位移平台, 以解决二维柔性平台尺寸大、行程小, 运动耦合误差大, 运动性能受加工误差影响等问题。设计的微位移平台在每个运动方向均采用两个音圈电机同时驱动, 通过调节两音圈电机信号比例来补偿加工误差造成的运动耦合误差, 完成X和Y方向的运动解耦, 从而降低系统对加工精度的依赖程度。根据卡氏第二定理建立了平台力学模型, 优化了平台尺寸参数, 并利用有限元仿真对设计的平台性能进行验证。最后, 搭建了微位移定位系统实验平台。实验结果表明: 设计的柔性平台行程与平台尺寸占比大, 定位精度高, 运动解耦性能得到大幅改善, 实现了±2.25 mm×±2.27 mm工作行程, 工作行程与平台尺寸占比约为1.73%, 运动耦合误差小于0.27%。

A two-dimensional parallel micro-displacement stage was designed based on double compound parallelogram flexures to solve the shortcomings of the stage in smaller motion strokes, larger coupling errors, and the motion performance sensitive to manufacturing errors. The designed micro-displacement stage was driven by two voice coil motors in each direction, the coupling motion errors caused by manufacturing errors were compensated by tuning the ratio of the signals imposed on the two drivers and the motion decouplings for X direction and Y direction was implemented. By which, the dependence of the system on manufacturing errors was reduced. On the basis of the Castigliano's second theorem, a model of stage mechanism was established to optimize the size parameters of the stage, and the performance of the designed stage was verified by finite element analysis. Finally, an experimental platform for the micro-displacement position was established. The experimental results demonstrate that the designed stage has a bigger stage stroke, a bigger area ratio (workspace size to planar dimension of the stage ), higher position accuracy, and excellent decoupling performance. It shows a large motion range of ±2.25 mm×±2.27 mm, an area ratio of 1.73%, and the coupling error of less than 0.27%.