研究了一种基于短相干光相移干涉法的便携式光学表面轮廓仪，分析了短相干光干涉显微镜相移干涉技术,实现了基于该项技术的光干涉显微系统。采用光路集成化的设计方法,实现了一体化轮廓仪光路集成,优化了机械三维调整测量台,实现了可用于大、小口径元件表面测量的正置、倒置两种测量模式。测试结果表明,仪器的粗糙度测量精度为0.1 nm,重复性误差优于0.01 nm,横向分辨率优于1 μm。

A portable microscopic profilometer is studied based on short-coherent light phase-shifting interferometric technique.The portable microscopic profilometer was designed and implemented which was based on short-coherent light interference microscopic techniques.The integration of the profilometer is achieved by integrating optical path.The design of mechanical 3D adjustment platform is optimized.The instrument contains upright and inverted measurement modes to adjust the detection of tiny and large aperture optical surfaces.The measurement experiments of the profilometer are carried out under laboratory condition.The instrument’s accuracy is up to 0.1 nm.Repeatability error is better than 0.01 nm and lateral resolution is better than 1 μm.