首页 > 论文 > 红外与激光工程 > 45卷 > 5期(pp:520007--1)

电热式微机电系统微镜傅里叶变换红外光谱仪

Fourier transform infrared spectrometer based on electro-thermal MEMS micro-mirror

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

为了研制小体积、低成本、高分辨率的微型傅里叶变换红外光谱仪, 通过选择电热式微机电系统(MEMS)微镜作为迈克尔逊干涉仪动镜, 在满足了傅里叶光谱仪小型化、便携化的同时, 利用折叠双S型Bimorph驱动结构来实现双倍位移量以确保较高分辨率, 并将分束器外置来进行不同波段的灵活选择, 进而实现全光谱范围的应用。以1 310 nm激光作为参考光光源, 钨灯宽带光作为待测光源信号, 通过信号采集、滤波、插值、光谱恢复步骤完成原始信号采集到光谱信号复原的过程。测试结果表明: 电热式微镜的位移量可达到500 ?滋m, 光谱理论分辨率1 nm, 光谱仪整机尺寸小至62 mm×62 mm×28 mm。测试基线噪声为0.000 04, 基线重复性为0.000 32, 吸光度重复性为0.000 48。性能指标能满足食品安全、药品检测、石油化工等领域的光谱检测应用。

Abstract

In order to develop the small, low-cost, high-resolution spectrometer, a miniaturization Fourier transform infrared spectrometer was design. By selecting electro-thermal MEMS micro-mirror as the moving mirror of Michelson interferometer to make the Fourier spectrometer miniaturization and portability. At the same time, to ensure a higher resolution, the folding double S Bimorph drive structure of double displacements was designed. The beam splitter was external for selection different wave band flexibly to achieve full spectrum range. Moreover, it used 1 310 nm laser as a reference light source, and tungsten lamp as interference light signal, through the signal acquisition, filtering, interpolation and spectrum recovery steps to complete that signal collected and absorption spectra recovery process. The results show that the displacement of electro-thermal micro-mirror can reach 500 ?滋m, and the theoretical resolution of the spectrum can be up to 1 nm, and the spectrometer machine size as small as 62 mm×62 mm×28 mm. Also the test results show that the baseline noise is 0.000 04, the repeatability of baseline is 0.000 32 and repeatability of absorbance is 0.000 48. The performance can meet spectrum detection applications of the food safety, drug testing, petrochemical and other fields.

Newport宣传-MKS新实验室计划
补充资料

中图分类号:O439

DOI:10.3788/irla201645.0520007

所属栏目:光电器件与微系统

基金项目:国家自然科学基金(11204046);国际合作研究项目(2014DFA00670);国家仪器研究专项基金(2011YQ03012407)

收稿日期:2015-09-05

修改稿日期:2015-10-07

网络出版日期:--

作者单位    点击查看

陆安江:贵州大学 大数据与信息工程学院, 贵州 贵阳 550025贵州省光电子技术及应用重点实验室, 贵州 贵阳 550025
张正平:贵州大学 大数据与信息工程学院, 贵州 贵阳 550025
白忠臣:贵州省光电子技术及应用重点实验室, 贵州 贵阳 550025
陈 巧:无锡微奥科技有限公司, 江苏 无锡 214135
秦水介:贵州省光电子技术及应用重点实验室, 贵州 贵阳 550025

联系人作者:陆安江(39146565@qq.com)

备注:陆安江(1978-), 男, 副教授, 博士, 主要从事光电子技术应用方面的研究。

【1】Chen Liang. Research and application of the micro spectrometer system [D]. Hangzhou: Zhejiang University, 2008: 1-15. (in Chinese)

【2】Khalil Diaa, Omran Hitham, Medhat Mostafa, et al. Miniaturized tunable integrated Mach-Zehnder MEMS interferometer for spectrometer applications[C]//SPIE, 2010, 7594(5): 155-179.

【3】Yu K, Lee D, Krishnamoorthy U, et al. Micromachined Fourier transform spectrometer on Silicon optical bench platform[C]//The International Conference on Solid-State Sensors, Actuators and Microsystems, IEEE, 2005: 523-530.

【4】Wang Yongqing, Ma Wen, Lou Jianzhong, et al. Investigation and progress of microspectrometer based on micro electro mechanical system[J]. Metallurgical Analysis, 2006, 26(4): 43-44. (in Chinese)

【5】Yang Xiaoxu, Zhou Sizhong, Xiangli Bin, et al. Studies on nonlinearity of optical path difference of rotary Fourier transform spectrometer[J]. Acta Optica Sinica, 2004, 24(10): 1388-1392. (in Chinese)

【6】Khalil D, Sabry Y, Omran H, et al. Characterization of MEMS FTIR spectrometer[C]//MOEMS and Miniaturized Systems, SPIE-The International Society for Optical Engineering, 2011, 7930: 876124.

【7】Wu Lei, Pais A, Samuelson S R, et al. A miniature Fourier transform spectrometer by a large-vertical-displacement microelectromechanical mirror[C]//Fourier Transform Spectroscopy, Optical Society of America, 2009.

【8】Wu Lei, Xie Huikai. A large vertical displacement electrothermal bimorph microactuator with very small lateral shift[J]. Sensors & Actuators A Physical, 2008, 145-146(7): 371-379.

【9】Weng Shifu. Fourier Transfom Infrared Spectroscopy [M]. Beijing: Chemical Industry Press, 2010. (in Chinese)

【10】Pal S, Xie Huikai. Analysis and fabrication of curved multimorph transducers that undergo bending and twisting[J]. Journal of Microelectromechanical Systems, 2012, 21(5): 1241-1251.

【11】Chen Qiao, Xie Huikai, Zhou Liang. A optical interference platform and assembly method with MEMS: China,103063130A, 2013-04-24. (in Chinese)

【12】Zhang Ning, Liu Yulong, Wu Jiahui, et al. Design of CCD data acquisition system of miniature spectrometer[J]. Infrared and Laser Engineering, 2015, 44(1): 142-145. (in Chinese)

引用该论文

Lu Anjiang,Zhang Zhengping,Bai Zhongchen,Chen Qiao,Qin Shuijie. Fourier transform infrared spectrometer based on electro-thermal MEMS micro-mirror[J]. Infrared and Laser Engineering, 2016, 45(5): 0520007

陆安江,张正平,白忠臣,陈 巧,秦水介. 电热式微机电系统微镜傅里叶变换红外光谱仪[J]. 红外与激光工程, 2016, 45(5): 0520007

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF