建立了光机一体化仿真方法，从而实现对光学系统的性能评估。利用Ansys有限元软件进行热-结构仿真，将得到的数据文件进行刚体位移分离时采用新的评价函数，通过设置位移参量和随机值验证计算精度达到0.3%。运用Householder算法做Zernike拟合，将拟合系数作为与ZEMAX进行通信的数据接口，并采用动态数据交换技术实现Matlab与Zemax的数据交换。在此基础上给出一个角度检测物镜仿真的实例，得到了光学畸变随温度变化的曲线，说明为达到1″的测量精度，需保证工作温度范围为14~26 ℃。

An integrated simulation method is established, and the performance assessment of optical systems is obtained, accordingly. New assessment functions are used for rigid-body displacement separation, which is conducted by deformation data from the Ansys thermal simulation. The computational accuracy of 0.3% is tested through setting displacement parameter and random value. Householder algorithm is adopted for Zernike fitting, and the Zernike coefficients are used as the interface for data exchange with Zemax, which is achieved by dynamic data exchange technology. The simulation of an objective lens is taken as an example, and a distortion-thermal curve is presented. The result indicates that in order to guarantee measuring accuracy of 1″, the working temperature should be in the range from 14 ℃ to 26 ℃.