为了满足激光3维微加工不断提高的精度要求、不断增大的加工尺寸范围，以及加工效率的上升需求，采用理论分析和计算结合的方法，研制出由动态聚焦镜和2维扫描振镜组合的动态聚焦系统，与高精度X-Y-Z 3维高精度工作台集成为一台激光大尺度3维动态聚焦扫描加工设备。设计了焦距为100mm、视场角±15°、光阑口径7mm、后工作距137mm、相对畸变小于0.5%的远心f-θ镜和入光口径8mm、光学杠杆比1∶8、后工作距800mm±40mm的动态聚焦镜系统，并使用ZEMAX软件对系统关键光学部件动态聚焦镜和远心f-θ镜进行光学设计及系统性能评价。结果表明，通过工艺控制软件分层拼接，实现了460mm×310mm×50mm大尺度3维动态聚焦的高精度紫外激光微加工功能，在该3维扫描范围内，激光聚焦光斑直径始终保持小于10μm，从而满足大尺度激光3维精密微加工需求。

In order to meet the requirements of increasing precision, processing size and processing efficiency of 3-D laser micromachining, after theoretical analysis and calculation, a dynamic focusing system was designed combining the dynamic focusing lens with the 2-D galvanometer scanning system. A large scale 3-D laser dynamic focusing scanning processing system was proposed with the combination of the dynamic focusing system and a high precision X-Y-Z 3-D working stage. Telecentric f-θ lens was designed with focal length of 100mm, field angle of ±15°, aperture size of 7mm, back focal length of 137mm and relative distortion of less than 0.5%. And a dynamic focusing system was designed with aperture size of 8mm, optical leverage ratio of 1∶8 and back focal length of 800mm±40mm. ZEMAX was used to analyze and evaluate the optical design and system performance of the dynamic focusing lens and telecentric f-θ lens. The results show that, after layer stitching with the process control software, large-scale (460mm × 310mm × 50mm) 3-D dynamic focusing precision UV laser micromachining system is achieved. In 3-D scanning range, laser beam spot diameter remains always less than 10μm and meets the needs of large-scale 3-D precision laser micromachining.