激光技术, 2016, 40 (4): 506, 网络出版: 2016-07-26
飞秒激光测量微纳材料热物性参量研究进展
Research advance of measurement of thermo-physical property of micro-nano material with femtosecond laser
超快光学 飞秒激光 微纳尺度 物性测量 ultrafast optics femtosecond laser micro-nano structure measurement of physical property
摘要
随着微纳加工技术的发展,微纳尺度下材料的热物性参量测量变得尤为重要。首先介绍了飞秒激光测量微纳尺度下材料热物性参量的基本原理、测量系统的实现方法,对比了所采用的双温模型、双曲两步辐射模型、双曲一步模型、抛物一步模型、双相滞模型和抛物两步模型等主要的传热模型。其次,介绍了飞秒激光测量物性参量的基本特点。然后,介绍了单波长正面抽运与探测系统、双波长正面抽运及探测和加热探测不同侧3种常见结构的飞秒激光物性测量系统。最后,展望了飞秒激光物性测量的研究方向。
Abstract
With the development of micro-nano fabrication,the measurement of thermo-physical property of micro-nano material becomes more significant. At first, the basic principle of measurement of the thermo-physical property of micro-nano material with femtosecond laser and the means of realization were introduced. And then, two-temperature model, hyperbolic two-step model, hyperbolic one-step model, parabolic one-step model, dual-phase-lag model and parabolic two-step model were compared. Secondly, the characteristics of the measurement of the thermo-physical property of micro-nano material with femtosecond laser were introduced. Thirdly, three common system such as single-color femtosecond laser pump in front and probe system, two-color femtosecond laser pump in front and probe system, and single-color femtosecond laser pump and probe system in different side were introduced. Finally, the direction of future research in measurement of the thermo-physical property of materials was pointed out.
夏胜全, 吕学超, 王晓波, 何建军, 王巍, 窦政平. 飞秒激光测量微纳材料热物性参量研究进展[J]. 激光技术, 2016, 40(4): 506. XIA Shengquan, L Xuechao, WANG Xiaobo, HE Jianjun, WANG Wei, DOU Zhengping. Research advance of measurement of thermo-physical property of micro-nano material with femtosecond laser[J]. Laser Technology, 2016, 40(4): 506.