红外与毫米波学报, 2016, 35 (3): 300, 网络出版: 2016-07-26
太赫兹波近场成像综述
Review of THz near-field imaging
太赫兹波 近场成像 衍射极限 隐失波 微纳结构 THz wave near-field imaging diffraction limit evanescent wave microstructure
摘要
太赫兹波成像作为可见光和微波成像等的拓展,在半导体材料表征、生物组织诊断、无损检测和安检等领域表现出许多独特的优点,得到了越来越广泛的关注.传统太赫兹波成像受长波长对应的衍射极限的限制,分辨率较低.而太赫兹波近场成像是目前突破该限制,获得亚微米甚至是纳米量级高分辨图像的研究热点之一.首先介绍了近场机制与成像的基本原理;其次总结了太赫兹波近场成像的几种常用方法及其对应研究进展和当前存在的问题,包括孔径型、针尖型、亚波长太赫兹源型和微纳结构调控型等;最后探讨了该方向的发展趋势.
Abstract
As the extension of optical and microwave imaging, THz imaging has now attracted broad attention and showed many unique advantages in areas such as characterizations of semiconductor materials, diagnoses of biological tissues, nondestructive tests and security inspections. According to the diffraction limit, traditional THz imaging is subjected to the shortcoming of its long wavelength that results in a low spatial resolution. However, THz near-field imaging is one of the research highlights to surpass the limit and obtain images with spatial resolutions up to sub-micrometer or even nanometer scale. In this paper, the schemes and basic principles of THz near-field imaging were introduced. Then, four kinds of typical methods, as well as their recent progress and existing problems, were reviewed in detail, including aperture based, tip based, sub-wavelength THz source based, and microstructure control based techniques. Finally, developing prospects were discussed.
刘宏翔, 姚建铨, 王与烨, 徐德刚, 贺奕焮. 太赫兹波近场成像综述[J]. 红外与毫米波学报, 2016, 35(3): 300. LIU Hong-Xiang, YAO Jian-Quan, WANG Yu-Ye, XU De-Gang, HE Yi-Xin. Review of THz near-field imaging[J]. Journal of Infrared and Millimeter Waves, 2016, 35(3): 300.