基于反射率测量原理，提出了一种具有对称性和自校准的薄膜透反射率测量仪器。仪器具有两个照明系统和两个光收集系统,并分别对称地置于样品台的两侧,测量时测量光线依次经过照明系统、样品和光收集系统。由于该设计具有对称性,因而可消去光学系统的不对称误差,而且可实现自校准功能,同时获得垂直入射情况下薄膜的反射、透射和光学损耗。

Based on the transmittance and reflectance measurement principle,we put forward a thin-film transmittance and reflectance measurement instrument design with symmetry and self-calibration property.Instrument has two light systems and two light collection systems,which are symmetrically set up on both sides of the sample stage.To measure the transmittance and reflectance of the film sample,the measured light passes through light system,sample and collection system,respectively.This symmetrical design can eliminate the asymmetry error of optical system,realize the function of self-calibration,and get transmittance,reflectance as well as optical loss of the film at normal incidence at the same time.